利用氣相色譜儀對三氯氫硅中的氯硅烷進(jìn)行了分析檢測。結(jié)果表明:選擇程序升溫能更好的將各種氯硅烷進(jìn)行分離,當(dāng)載氣流速為20ml/min,參比流速為30ml/min時,方法的靈敏度最高;利用標(biāo)準(zhǔn)物質(zhì)以及同系物沸點規(guī)律對三氯氫硅中的氯硅烷進(jìn)行了準(zhǔn)確定性;以SiCl4為標(biāo)準(zhǔn)物質(zhì),通過對相對校正因子的計算,發(fā)現(xiàn)各種氯硅烷的相對校正因子都接近于1;用面積百分比法方便、準(zhǔn)確、快速的對各種氯硅烷進(jìn)行了定量分析,定量相對標(biāo)準(zhǔn)偏差小于3%。
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名稱：DC-550填充柱
規(guī)格：3m*1/8
使用溫度：240°C
貨號：20231123006
應(yīng)用：三氯氫硅，四氯化硅等分離
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Gas chromatography was used to analyze and detect chlorosilane in trichlorosilane. The results show that selecting programmed heating can better separate various chlorosilanes. When the carrier gas flow rate is 20ml/min and the reference flow rate is 30ml/min, the sensitivity of the method is the highest; Accurate characterization of chlorosilane in trichlorosilane was carried out using standard substances and the boiling point law of homologues; By using SiCl4 as the standard substance and calculating the relative correction factors, it was found that the relative correction factors of various chlorosilanes were close to 1; The area percentage method was used for convenient, accurate, and rapid quantitative analysis of various chlorosilanes, with a relative standard deviation of less than 3%.
Name: DC-550 filled column
Specification: 3m * 1/8
Operating temperature: 240 ° C
Product number: 2023112306
Application: Separation of trichlorosilane, tetrachlorosilane, etc
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